Omar Limited

Multiple gases in one device equals maximum process flexibility and productivity. The GF40 Series elastomer sealed mass flow controllers and meters with Brooks Instrument’s exclusive MultiFlo™ technology provide the perfect choice for systems, processes and facilities that use a variety of gases, change gas types frequently or need to re-range while preserving gas measurement and control accuracy. It enables a new level of process flexibility combined with unprecedented flow measurement and control performance.

Features

* Programmable multi-gas/multi-range capabilities

* Brooks® MultiFlo™ gas database contains thousands of native gas runs to establish correction functions

* Sub-1 second flow response time and accuracy of 1% set point for demanding applications

* Well suited for a variety of gases

* Fast response, Hastelloy sensor

* Easily accessible diagnostic service port is independent of tool communication

* Multi-protocol communication options include DeviceNet™, EtherCAT®, Profibus® and RS-485 analog interface

Benefits

* MultiFlo™ technology enables new gas calibrations and full-scale ranges without removing the MFC from the gas line, maximizing process uptime

* MultiFlo™ programming is simple and user-friendly; new gas can be selected in under 60 seconds

* OEMs and large end users can greatly reduce the number of gas and range-specific controllers they inventory

* Excellent process gas accuracy backed by superior metrology systems and calibration based on global standards

* Corrosion-resistant sensor provides unmatched long-term stability ensuring maximum yield and throughput

* User-accessible service port simplifies troubleshooting and diagnostic tasks

* Variety of elastomer seals provide cost performance flexibility across range of applications

* Multi-protocol communication interface supports integration into existing systems

Applications

* Solar cell chemical vapor deposition systems

* Life sciences bioreactors

* Vacuum processes

* Nanotechnology/MEMS fabrication

* Plasma, glass and web coating systems

* Excellent option for manifold/gas delivery systems